作者: Ji Cheng Ding , Teng Fei Zhang , Zhi Xin Wan , Hai Juan Mei , Myung Chang Kang
DOI: 10.1155/2018/6491279
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摘要: The Cr-Cu-N coatings with various Cu contents (0–25.18 (±0.17) at.%) were deposited on Si wafer and stainless steel (SUS 304) substrates in reactive Ar+N2 gas mixture by a hybrid coating system combining pulsed DC RF magnetron sputtering techniques. influence of content the composition, microstructure, mechanical properties was investigated. microstructure significantly altered introduction Cu. exhibit solid solution structure different compositions all samples. Addition is intensively favored for preferred orientation growth along (200) direction restricting (111) direction. With increasing content, surface cross-sectional morphology changed from triangle cone-shaped, columnar feature to broccoli-like compact glassy respectively. including residual stress, nanohardness, toughness explored basis content. highest hardness obtained at 1.49 (±0.10) at.%.