Reactive Deposition of Metal Thin Films within Porous Supports from Supercritical Fluids

作者: Neil E. Fernandes , Scott M. Fisher , Joseph C. Poshusta , Dionisios G. Vlachos , Michael Tsapatsis

DOI: 10.1021/CM000837T

关键词:

摘要: Continuous palladium films were synthesized at controlled depths within porous alumina disks by H2 reduction of organopalladium compounds dissolved in supercritical CO2 60 °C using an opposing reactants deposition geometry. Film position was adjusting the relative concentrations and precursor (π-2-methylallyl(cyclopentadienyl)palladium (II) or palladium(II) hexafluoroacetylacetonate) on opposite sides substrate. Because a disparity diffusivity metal support, temporary barrier poly-4-methyl-1-pentene side substrate used to reduce flux manner. Guided simple mass transport model, Pd between 2 80 μm thick deposited prescribed 600 as measured from side. Electron probe microanalysis indicated complete pore filling reaction zone X-ray diffraction revealed that structure o...

参考文章(2)
Robert Louis Iampietro, Robin Edward Richards, Paul Nigel Dyer, Method for manufacturing inorganic membranes by organometallic chemical vapor deposition ,(1992)