Tribological characteristics of amorphous carbon films investigated by point contact microscopy

摘要: Wear marks and frictional force distribution on amorphous carbon films, fluorinated silicon‐containing films were investigated by point contact microscopy. Film surfaces also analyzed x‐ray photoelectron spectroscopy. The (40%) film has the highest strength of tested films. CF4 plasma treatment film, significantly reduced its coefficient to less than 0.3. surface is composed carbon, silicon, fluorine, oxygen. Carbon, fluorine show plural chemical states SiC CFx. This increases enhances lubricating effect film.