Method and apparatus for producing photoelectric conversion device
作者： Kazutaka Yanagita , Kiyofumi Sakaguchi , Masaaki Iwane , Takao Yonehara , Kazuaki Ohmi
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摘要: There is disclosed a method of producing photoelectric conversion device comprising the steps forming semiconductor substrate first and second layers with separation layer therebetween; bonding support to surface opposite separation-layer-side form bonded substrate; separating by layer; in layer, wherein when each other, at least portion formed which part end portions not other fluid jetted against side substrate, thereby layers. The makes it possible separate high yield, supplying devices quality low production cost.
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