Nonspecular x-ray reflection from rough multilayers.
作者： V. Holý , T. Baumbach
DOI: 10.1103/PHYSREVB.49.10668
关键词:
摘要: X-ray reflection from periodical multilayers with randomly rough interfaces has been described within the distorted-wave Born approximation. The method is suitable for calculating both specular x-ray and nonspecular (diffuse) scattering. In this paper, in-plane vertical correlations of roughness profiles have considered it demonstrated that correlation substantially affects theory can explain resonant effects observed in beam scattered nonspecularly a multilayer. theoretical approach used study interfacial long-periodic AlAs/GaAs multilayer good agreement achieved between experimental results theory.
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