Solid-state image sensor and method of manufacturing the same

作者: Mineo Shimotsusa

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摘要: A method of manufacturing a solid-state image sensor, includes forming first isolation region conductivity type in semiconductor layer having and second surfaces, the including implantation for implanting ions into through surface, charge accumulation regions layer, performing annealing, an interconnection on side surface after surface. The are arranged between adjacent regions.

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