Scribing head, and scribing apparatus and scribing method using the scribing head

摘要: A scribing head 1 of this invention raises and lowers a cutter by rotation servomotor 3. As scribe pressure, rotational torque the 3 is transmitted to cutter. To form line across another which formed earlier, pressure raised temporarily when passes earlier. The controlled at any preset limits while position 6 shifts on brittle substrate. driven under position-control mode.