Sapphire substrates and methods of making same
作者： Palaniappan Chinnakaruppan , Brahmanandam V. Tanikella , Robert A. Rizzuto , Matthew A. Simpson , Ramanujam Vedantham
DOI:
关键词:
摘要: A sapphire substrate includes a generally planar surface having crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, nTTV not greater than about 0.037 µm/cm2, wherein is total thickness variation normalized for area surface, diameter less 9.0 cm.
lens.org参考文章(88)
Steven E. Molis, David R. Clarke, Measurement of Stresses Using Fluorescence in an Optical Microprobe: Stresses around Indentations in a Chromium‐Doped Sapphire Journal of the American Ceramic Society. ,vol. 73, pp. 3189- 3194 ,(1990) , 10.1111/J.1151-2916.1990.TB06435.X
BERNARD J. HOCKEY, Plastic Deformation of Aluminum Oxide by Indentation and Abrasion Journal of the American Ceramic Society. ,vol. 54, pp. 223- 231 ,(1971) , 10.1111/J.1151-2916.1971.TB12277.X
Joseph A. Randi, John C. Lambropoulos, Stephen D. Jacobs, Subsurface damage in some single crystalline optical materials Applied Optics. ,vol. 44, pp. 2241- 2249 ,(2005) , 10.1364/AO.44.002241
Yiyang Zhou, Mark Atwood, Donald Golini, Maynard Smith, Paul D. Funkenbusch, Wear and self-sharpening of vitrified bond diamond wheels during sapphire grinding Wear. ,vol. 219, pp. 42- 45 ,(1998) , 10.1016/S0043-1648(98)00230-0
R. Harman, V. Tvarožek, O. Vaněk, M. Kempný, J. Liday, R.F. sputtered silicon films on sapphire Thin Solid Films. ,vol. 32, pp. 55- 59 ,(1976) , 10.1016/0040-6090(76)90554-X
P. J. Zanzucchi, M. T. Duffy, R. C. Alig, Optical Reflectance Method for Determining the Surface uality of Sapphire ( Al2 O 3 ) Journal of The Electrochemical Society. ,vol. 125, pp. 299- 305 ,(1978) , 10.1149/1.2131432
Seong-Woo Kim, Hideo Aida, Toshimasa Suzuki, The effect of a slight mis-orientation angle of c-plane sapphire substrate on surface and crystal quality of MOCVD grown GaN thin films Physica Status Solidi (c). ,vol. 1, pp. 2483- 2486 ,(2004) , 10.1002/PSSC.200405028
Paul D. Funkenbusch, Toshio Takahashi, Workpiece roughness and grindability Optical Science, Engineering and Instrumentation '97. ,vol. 3134, pp. 293- 300 ,(1997) , 10.1117/12.279125
Chandra P. Khattak, Frederick Schmid, Paul J. Guggenheim, Maynard B. Smith, Henry H. Rogers, Kurt Schmid, Production of Sapphire Blanks and Substrates for Blue LEDs and LDs MRS Proceedings. ,vol. 743, ,(2002) , 10.1557/PROC-743-L3.39
P.D. Funkenbusch, Yiyang Zhou, Toshio Takahashi, Donald Golini, Grinding of single crystal sapphire: workpiece roughness correlations Wear. ,vol. 218, pp. 1- 7 ,(1998) , 10.1016/S0043-1648(98)00206-3