Microswitch Beam-Steering Grids

摘要: Abstract : The goal was to design and fabricate beam-steering arrays based on micro-electro-mechanical systems (MEMS) at millimeter wavelengths (35 94 GHz). a unit-cell waveguide model, HFSS used in the theoretical analyses. Dry substrate etch with Si/SiO2(+) membrane found be most promising fabrication technology. Rockwell Science Center manufactured arrays. measured passive structures show good performance. phase difference between an inductive capacitive pair is about 1250 frequency range of 75-90 GHz. average loss 77 GHz 3.2 dB. Good agreement experimental results found. has had difficulties fabricating micro switch A major difficulty been switches membrane. have showed increased deflection upwards time. Some fractured during wire bonding. Other broke actuation. These issues must resolved before this approach becomes practical.