Hybrid optical integrated circuit

作者: Mitsuho Yasu , Yasufumi Yamada , Morio Kobayashi , Masao Kawachi , Hiroshi Terui

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摘要: A hybrid optical integrated circuit having a high-silica glass waveguide formed on silicon substrate, an fiber and device coupled optically to the waveguide, guide substrate for aligning at predetermining positions, respectively, relative waveguide. Islands carrying electrical conductors are disposed substrate. first conductor film is Second films top surfaces of guide, islands electrically isolated from film. An member provided feed electric power second which needs supply. The same Alignment various portions facilitated when assembling circuit. high coupling efficiency realized with low cost.

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