Humidity sensor based on Ga2O3 nanorods doped with Na+ and K+ from GaN powder

作者: Ding Wang , Yanlong Lou , Run Wang , Pengpeng Wang , Xuejun Zheng

DOI: 10.1016/J.CERAMINT.2015.07.211

关键词:

摘要: Abstract Gallium oxide (Ga 2 O 3) nanorods were prepared from commercial gallium nitride (GaN) powder via the simple thermal annealing method by one step, and they were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM), transmission electron microscope (TEM) and energy dispersive X-ray spectroscopy (EDS). The thick film humidity sensors were prepared by spin-coating the sensing materials on Al 2 O 3 ceramic substrates coated with Ag–Pd interdigitated electrodes and the humidity …

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