Light scattering from multilayer optics I Tools of investigation

摘要: We emphasize the role of correlated isotropy in study microroughness high-quality optical coatings. First, cross correlation between surfaces and coherence scattering sources are discussed compared. An degree roughness is then introduced as a quantitative value to describe angular disorder surface connected with polar dependence scattering. show how frequency variations this allow one solve inverse problem obtain unique solution for parameters that structural irregularities stacks. Light can also be used detect an oblique growth materials thin-film form. Finally, we sensitivity investigation method stack parameters.