Blister formation in ZrN/SiN multilayers after He irradiation
作者： VV Uglov , G Abadias , SV Zlotski , NT Kvasov , IA Saladukhin
DOI: 10.1016/J.SURFCOAT.2018.02.095
关键词:
摘要: Abstract The work is dedicated to the investigation of blister formation in ZrN/SiNx multilayer films irradiated with He ions (30 keV) and annealed a vacuum at 600 °C. Multilayer were prepared by reactive magnetron sputter-deposition on Si wafers under Ar + N2 plasma discharges. deposited sequential sputtering from elemental Zr Si3N4 targets substrate temperature 300 °C, ZrN SiNx layer thickness varying 2 10 nm. According transmission electron microscopy (TEM), consist nanocrystalline (002)-oriented amorphous layers. Surface morphology changes 600 °C studied scanning (SEM) atomic-force (AFM) methods. It has been found that irradiation remain resistant blistering flaking up fluence 8·1016 cm−2. investigations have shown influence crystalline thicknesses character damage degree surface as result post-radiation annealing In this potential processes (mechanisms) flacking systems are discussed.
sci-hub.se 参考文章(29)
Q.M. Wei, N. Li, N. Mara, M. Nastasi, A. Misra, Suppression of irradiation hardening in nanoscale V/Ag multilayers Acta Materialia. ,vol. 59, pp. 6331- 6340 ,(2011) , 10.1016/J.ACTAMAT.2011.06.043
Lionel Simonot, David Babonneau, Sophie Camelio, David Lantiat, Philippe Guérin, Bruno Lamongie, Vivek Antad, In situ optical spectroscopy during deposition of Ag:Si3N4 nanocomposite films by magnetron sputtering Thin Solid Films. ,vol. 518, pp. 2637- 2643 ,(2010) , 10.1016/J.TSF.2009.08.005
I. N. Afrikanov, V. M. Gusev, M. I. Guseva, A. N. Mansurova, Yu. V. Martynenko, V. N. Morozov, O. I. Chelnokov, Helium blistering under high irradiation doses Soviet Atomic Energy. ,vol. 46, pp. 190- 196 ,(1979) , 10.1007/BF01125735
J.Y. Zhang, Y.Q. Wang, X.Q. Liang, F.L. Zeng, G. Liu, J. Sun, Size-dependent He-irradiated tolerance and plastic deformation of crystalline/amorphous Cu/Cu–Zr nanolaminates Acta Materialia. ,vol. 92, pp. 140- 151 ,(2015) , 10.1016/J.ACTAMAT.2015.03.055
A. Misra, M. J. Demkowicz, X. Zhang, R. G. Hoagland, The radiation damage tolerance of ultra-high strength nanolayered composites JOM. ,vol. 59, pp. 62- 65 ,(2007) , 10.1007/S11837-007-0120-6
Robin W. Grimes, Rudy J. M. Konings, Lyndon Edwards, Greater tolerance for nuclear materials Nature Materials. ,vol. 7, pp. 683- 685 ,(2008) , 10.1038/NMAT2266
Zong-Jian Liu, Ning Jiang, Y.G. Shen, Xiaonian Li, Stress-induced surface damages in Ti–Si–N films grown by magnetron sputtering Thin Solid Films. ,vol. 516, pp. 7609- 7614 ,(2008) , 10.1016/J.TSF.2008.04.090
S. Agarwal, P. Trocellier, Y. Serruys, S. Vaubaillon, S. Miro, Helium mobility in advanced nuclear ceramics Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 327, pp. 117- 120 ,(2014) , 10.1016/J.NIMB.2013.09.039
P.B. Johnson, D.J. Mazey, The gas-bubble superlattice and the development of surface structure in He+ and H irradiated metals at 300 K Journal of Nuclear Materials. ,vol. 93-94, pp. 721- 727 ,(1980) , 10.1016/0022-3115(80)90198-1
A Janse Van Vuuren, Johannes Henoch Neethling, Vladimir A Skuratov, Vladimir Vasilevich Uglov, S Petrovich, None, The effect of He and swift heavy ions on nanocrystalline zirconium nitride Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 326, pp. 19- 22 ,(2014) , 10.1016/J.NIMB.2013.10.063