Analysis of f-Q scaling in bulk acoustic wave resonators using different piezolayers

摘要: MEMS based Bulk Acoustic Wave (BAW) resonators are rapidly growing highly integrated devices which can offer high Quality Factor (Q) values at operating frequencies up to the VHF and UHF ranges i.e. f-Q product. In a BAW resonator, piezoelectric layer is main part of resonator generates vertical acoustic standing waves within layer. The resonant frequency mainly determined by thickness material piezolayer. this paper, analyzed for finding out Q hence product different using eigen analysis. Higher results in lower damping ratio longer resonance decay function. Larger products preferred low phase noise systems. Different piezomaterials providing As determines frequency, its temperature coefficient also affect thermal drift resonator. selection piezolayer done on certain parameters like scaling, drift, conductivity, power handling capability chemical stability. Modeling simulation optimization COMSOL Multiphysics software.