Chemical solutions system for processing semiconductor materials
作者： Kert Dolechek
DOI:
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摘要: A semiconductor processing system (30) has a liquid chemical and metering (60) including process tank (80) vessel (102). Fluid level detectors (104) detect the fluid in two stage fill valve (106) fills (102) from bottom to top. dispense (108) dispenses metered contents into via gravity, form solution (80), with high mixing accuracy. The volumes of inflow outflow rates are set provide 100 % up time chamber (38) which uses semiconductors or other flat media.
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