Flexible substrate electrostatic energy harvester

摘要: Energy harvesting is attractive for powering wireless sensors, especially in applications such as body sensor networks and pervasive sensing, where power source replacement or recharging impractical. A MEMS (micro-electro-mechanical systems) electrostatic device suitable motion has been reported previously, using a rolling rod the proof mass. new presented, employing flexible substrate to allow formation of concave structure. Suitable confinement increased rod-plate capacitance are achieved. Regular transduction even under impulse excitation reported, supplying 0.5 ?W output power.