One-Step Femtosecond Laser Stealth Dicing of Quartz.
作者： Caterina Gaudiuso , Annalisa Volpe , Antonio Ancona
DOI: 10.3390/MI11030327
关键词:
摘要: … surface roughness from 3 to 14 µm were obtained on a 2 mm-thick quartz sample. Wang et al. [15] demonstrated the shape cutting of quartz glass … laser for glass dicing using an axicon-…
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