Electromechanical carbon nanotube switches for high-frequency applications
作者： Anupama B. Kaul , Eric W. Wong , Larry Epp , Brian D. Hunt
DOI: 10.1021/NL052552R
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摘要: We describe the fabrication and characterization of a nanoelectromechanical (NEM) switch based on carbon nanotubes. Our NEM structure consists single-walled nanotubes (SWNTs) suspended over shallow trenches in SiO(2) layer, with Nb pull electrode beneath. The nanotube growth is done on-chip using patterned Fe catalyst methane chemical vapor deposition (CVD) process at 850 degrees C. Electrical measurements these devices show well-defined ON OFF states as dc bias up to few volts applied between CNT electrode. switches were measured have speeds that are 3 orders magnitude higher than MEMS-based electrostatically driven switches, switching times down nanoseconds, while same time requiring voltages less 5 V.
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