Methods of fabricating large-area, semiconducting nanoperforated graphene materials
作者： Nathaniel S. Safron , Michael S. Arnold , Myungwoong Kim , Padma Gopalan
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摘要: Methods for forming a nanoperforated graphene material are provided. The methods comprise an etch mask defining periodic array of holes over and patterning the into material. comprises pattern-defining block copolymer layer, can optionally also wetting layer neutral layer. consist single sheet or plurality sheets.
lens.org 参考文章(10)
Feng Liu, Magnetic nanohole superlattices ,(2009)
Thomas Andrew Winningham, Kenneth Douglas, Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation ,(2000)
Myungwoong Kim, Nathaniel S. Safron, Eungnak Han, Michael S. Arnold, Padma Gopalan, Fabrication and Characterization of Large-Area, Semiconducting Nanoperforated Graphene Materials Nano Letters. ,vol. 10, pp. 1125- 1131 ,(2010) , 10.1021/NL9032318
J Eroms, D Weiss, Weak localization and transport gap in graphene antidot lattices New Journal of Physics. ,vol. 11, pp. 095021- ,(2009) , 10.1088/1367-2630/11/9/095021
Feng Liu, Decai Yu, Elizabeth M. Lupton, Miao Liu, Wei Liu, Collective magnetic behavior of graphene nanohole superlattices Nano Research. ,vol. 1, pp. 56- 62 ,(2008) , 10.1007/S12274-008-8007-6
T. Shen, Y. Q. Wu, M. A. Capano, L. P. Rokhinson, L. W. Engel, P. D. Ye, Magnetoconductance oscillations in graphene antidot arrays Applied Physics Letters. ,vol. 93, pp. 122102- ,(2008) , 10.1063/1.2988725
David P. Nackashi, John Damiano, Stephen E. Mick, Sample support structure and methods ,(2007)
Joachim A. Fürst, Christian Flindt, Antti-Pekka Jauho, Antti-Pekka Jauho, Jesper Pedersen, Thomas G. Pedersen, Niels Asger Mortensen, Mads Brandbyge, Electronic properties of graphene antidot lattices New Journal of Physics. ,vol. 11, pp. 095020- ,(2009) , 10.1088/1367-2630/11/9/095020
Wai-kin Li, Haining Yang, Fully and uniformly silicided gate structure and method for forming same ,(2007)
Wai-kin Li, Haining S. Yang, Sub-lithographic interconnect patterning using self-assembling polymers ,(2007)