Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells
作者： Qiumei Bian , Xiaoming Yu , Baozhen Zhao , Zenghu Chang , Shuting Lei
DOI: 10.1016/J.OPTLASTEC.2012.06.018
关键词:
摘要: Finding ways to scribe indium-tin oxide (ITO) coating plays an important role in the fabrication and assembly of thin film solar cells. Using a femtosecond (fs) laser, we selectively removed ITO films with thickness 120–160 nm on glass substrates. In particular, studied effect laser pulse duration, fluence scanning speed ablation ITO. The single thresholds at various durations were determined ablate films. Clean removal layer was observed when above threshold 0.30 J/cm
harvard.edu
ucf.edu
elsevier.com
els-cdn.com参考文章(27)
S. Wiedeman, R. G. Wendt, J. S. Britt, Module interconnects on flexible substrates National center for photovoltaics (NCPV) 15th program review meeting. ,vol. 462, pp. 17- 22 ,(2008) , 10.1063/1.57949
Avanish Kumar Dubey, Vinod Yadava, Laser beam machining—A review International Journal of Machine Tools and Manufacture. ,vol. 48, pp. 609- 628 ,(2008) , 10.1016/J.IJMACHTOOLS.2007.10.017
Jaegu Kim, Suckjoo Na, Metal thin film ablation with femtosecond pulsed laser Optics and Laser Technology. ,vol. 39, pp. 1443- 1448 ,(2007) , 10.1016/J.OPTLASTEC.2006.10.001
Seongkuk Lee, Dongfang Yang, Suwas Nikumb, Femtosecond laser patterning of Ta0.1W0.9Ox/ITO thin film stack Applied Surface Science. ,vol. 253, pp. 4740- 4747 ,(2007) , 10.1016/J.APSUSC.2006.10.040
M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, A. M. Rubenchik, Ultrashort-pulse laser machining of dielectric materials Journal of Applied Physics. ,vol. 85, pp. 6803- 6810 ,(1999) , 10.1063/1.370197
E. G. Gamaly, A. V. Rode, B. Luther-Davies, V. T. Tikhonchuk, Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics Physics of Plasmas. ,vol. 9, pp. 949- 957 ,(2002) , 10.1063/1.1447555
Shouyuan Chen, Michael Chini, He Wang, Chenxia Yun, Hiroki Mashiko, Yi Wu, Zenghu Chang, Carrier-envelope phase stabilization and control of 1 kHz, 6 mJ, 30 fs laser pulses from a Ti:sapphire regenerative amplifier. Applied Optics. ,vol. 48, pp. 5692- 5695 ,(2009) , 10.1364/AO.48.005692
ZB Wang, MH Hong, YF Lu, DJ Wu, B Lan, TC Chong, None, Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air Journal of Applied Physics. ,vol. 93, pp. 6375- 6380 ,(2003) , 10.1063/1.1568154
F. Kessler, D. Herrmann, M. Powalla, Approaches to flexible CIGS thin-film solar cells Thin Solid Films. ,vol. 480, pp. 491- 498 ,(2005) , 10.1016/J.TSF.2004.11.063
R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, F. Dausinger, Pulse width and energy influence on laser micromachining of metals in a range of 100fs to 5ps Applied Surface Science. ,vol. 249, pp. 322- 331 ,(2005) , 10.1016/J.APSUSC.2004.12.027