High aspect ratio diamond microelectrode array for neuronal activity measurements

摘要: Abstract Diamond exhibits several attractive properties for bio-sensing applications. In particular its high bio inertness, electrochemical stability, and optical transparency provide diamond with interests neural activity study. The purpose of this study is the realisation microelectrodes arrays (MEA) in neurons slices Due to a cellular lysis on edge tissue studied, electrodes have be at least 60 μm height even though electrode surface has minimised order achieve good signal noise rate. Silicon MEA metal contacts were realised using (Deep Reactive Ion Etching) DRIE coated Nanocrystaline (NCD) (Bias Enhanced Nucleation) BEN technique. We focus understanding nucleation process such aspect ratio electrodes. Several parameters as slope substrate, conductivity chemical nature substrate studied enable selective necessary fabricate MEAs. leads optimised development processing route enabling coating active tips MEAs without altering electrical insulation between probes.