Implantation of Insulators: Ices and Lithographic Materials

摘要: Publisher Summary This chapter discusses the implantation of insulators. The study change in properties insulating solids caused by bombardment energetic ions opens an array questions concerning mechanisms that are active. It also leads to consideration consequences these interactions areas as diverse astrophysics and solid state technology. sensitivity electronic nuclear energy input from ion beam is a challenge particular interest because it involves transfer excitation ionization motion nuclei solid. nonlinearity response deposited density points importance spatial correlation among individual or events. nonlinearities may be collective phenomena such thermal spikes. Original molecular structures altered passage ions, new molecules formed. For interplanetary ices exposed erosion fragmentation important variety astrophysical problems.