Epitaxial deposition of silicon on alpha-aluminum
作者： Harold M Manasevit , William I Simpson
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lens.org 参考文章(3)
Lesky Joseph, Mayer Alfred, Depositing epitaxial layer of silicon from a vapor mixture of sih4 and h3 ,(1963)
Frederick C Cowlard, Leighton G Penhale, Production of silicon with a predetermined impurity content ,(1962)
Law John Trevor, Method of controlled doping in an epitaxial vapor deposition process using a diluentgas ,(1962)