Hydrogen permeation through silicon nitride films
作者： Vincenc Nemanič , Paul J. McGuiness , Nina Daneu , Bojan Zajec , Zdravko Siketić
DOI: 10.1016/J.JALLCOM.2012.05.110
关键词:
摘要: … A silicon nitride film with a low hydrogen content is a far less efficient barrier, which supports … angle) in order to stop the scattered 7 Li ions (only recoiled hydrogen was detected). In …
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