Dynamics and vibration analysis of an electrostatically actuated FGM microresonator involving flexural and torsional modes

摘要: Abstract In this paper a nonlinear pedal like microresonator made of Functionally Graded material is introduced and modeled. Using Lagrangian formulation equations motion the system are derived natural frequencies mode shapes extracted by linear analysis. The effects various parameters such as geometry, FG index DC voltages on investigated. Static pull-in obtained it found that depending type actuation, both softening hardening behaviors can be observed in system. results compared with previous studies finite element method where good agreement achieved. A two-mode reduced order model along first-order averaging technique implemented to derive asymptotic dynamic motion. different including AC actuation level, damping power response studied around resonance conditions. It when adjusted properly, directly excited in-plane mode, turn excites out-of-plane torsional structure through internal 1:2 ratio within specific frequency bandwidth. wide range will available changing only manipulated used MEMS applications mass sensors RF filter-mixer devices.