Micro-Fabrication of Gas Sensors
作者： Jan Spannhake , Andreas Helwig , Olaf Schulz , Gerhard Müller
DOI: 10.1007/978-0-387-09665-0_1
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摘要: … In this work the focus has been building up a MEMS toolkit [… from an anodically bonded glass–silicon–glass stack. This … sealing the microphone glass–silicon–glass stack via anodic …
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