Ultrasonic vibrator, wet-treatment nozzle, and wet-treatment apparatus

摘要: An ultrasonic vibrator includes a diaphragm, side plate which stands on the principal surface of and body placed inside diaphragm in order to apply vibration diaphragm. The has thin portion at least part periphery an area where is placed. A wet-treatment nozzle supply pipe having, one end, inlet for admitting treatment liquid, drain outlet discharging waste liquid outside after wet treatment, connecting faces workpiece connects other ends pipe. nozzle.