Method of making miniature high frequency SC-cut quartz crystal resonators

摘要: Miniature high frequency SC-cut quartz crystal resonators are made from a plano-plano wafer by chemically polishing the wafer; then chemomechanically polished depositing suitable pattern of etch resist on using standard photolithographic techniques; stripping photoresist placing evaporative mask into intimate contact with electrodes testing so formed selectively separating those having desired properties; mounting selected an enclosure; adjusting to exact desired; and hermetically sealing enclosure.