Micromachined Mercury Drop Tilt Sensor

摘要: This paper proposes a tilt sensor made by MEMS technology. The consists of an electrode glass small mercury drop circular channel and cover glass. is used as medium current flow in contact with two chromel electrodes angular-motion resistance When this inclines the inside moves into bottom under influence gravity. A angle can be measured changed tilting sensor, has linear section between +50. -50. accuracy 2.. We are also studying about enlargement effect size