Nano-indentation and tribological studies of ultrahigh strength carbon nitride thin films

摘要: Carbon nitride (CNX) thin films were prepared by DC magnetron sputtering of a graphite target in nitrogen ambient onto Si(100) and M2 steel substrates held at temperatures. All CNx coatings grown to thickness 1.5 μm are adherent smooth. Nanoindentation studies showed that amorphous have hardness effective Young's modulus comparable those hard carbon. In dry sliding against 52100 steel, CNx-coated give initial friction coefficients ˜0.1, rising around 0.5 the steady state. The wear life coated steels varies inversely with normal load, about two orders magnitude higher than uncoated load 1.3N speed 0.12 m/s. This improvement is attributed high yield strength carbon coatings. Presented as Society Tribologists Lubrication Engineers paper STLE/ASME Tribology Conference New Orleans, Louisiana, October 24–27, 1993