作者: B. C. Bayer , S. Hofmann , C. Castellarin-Cudia , R. Blume , C. Baehtz
DOI: 10.1021/JP102986F
关键词:
摘要: … To clarify this interaction, we characterized the Ta films structurally after … Ta film and Si substrate. We focus on XRD results for the Ta(30W) and Ta(75W) films because the results on Ta(…