Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD
作者： E. Vassallo , A. Cremona , F. Ghezzi , F. Dellera , L. Laguardia
DOI: 10.1016/J.APSUSC.2005.10.017
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摘要: … In this paper structural and optical properties of a-Si:C:N:H films, deposited by PECVD … material, the edge of the optical absorption spectrum is quite sharp and the material is very …
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