Measurement of focusing properties for high numerical aperture optics using an automated submicron beamprofiler
作者： E. W. Streed , B. G. Norton , J. J. Chapman , D. Kielpinski
DOI: 10.1063/1.2991112
关键词:
摘要: The focusing properties of three aspheric lenses with numerical aperture (NA) between 0.53 and 0.68 were directly measured using an interferometrically referenced scanning knife-edge beam profiler sub-micron resolution. results obtained for two the tested in agreement paraxial gaussian theory. It was also found that highest NA lens which designed 830nm not diffraction limited at 633nm. This process automated motorized translation stages provides a direct method testing design specifications high optics.
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core.ac.uk 参考文章(13)
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