Emission of Backscattered and Secondary Electrons
作者： Ludwig Reimer
DOI: 10.1007/978-3-540-38967-5_4
关键词:
摘要: Backscattered electrons (BSE) and secondary electrons (SE) are the most important signals for image recording. A knowledge of the dependence of the backscattering coefficient η and the secondary electron yield δ on surface tilt, material and electron energy and their angular and energy distributions is essential for the interpretation of image contrast. The spatial exit distributions and information depths of these electrons govern the resolution if the latter is not limited by the electron-probe size. The shot noise introduced by the incident electron …
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