Pulsed Microplasma Using Carbon Nanotubes for Cathode

作者: Qin Zou , Hiroaki Kanakusa , Hiroaki Yoshimura , Akimitsu Hatta

DOI: 10.1143/JJAP.45.8225

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摘要: Using carbon nanotubes (CNTs) or a flat Pt film for the cathode, microplasma was produced in scanning electron microscope (SEM) chamber containing Ar gas at nearly atmospheric pressure, with gap lengths from 10 to 800 µm. Field emission measurements were carried out SEM chamber, and discharges conducted same configuration cell installed chamber. The ignition voltages using CNT cathode much lower than those under conditions, because of field emission. discharge reproducible every time, ensured supply primary electrons. It suggested that pulse convolution discrete avalanche originating

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