Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas
作者： Caleb T Nelson , Lawrence J Overzet , Matthew J Goeckner , None
DOI: 10.1116/1.3679408
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摘要: This article serves as a reference for the analysis of Fourier transform infrared spectroscopy data from processing plasmas. Until now, there has been lack accurate addressing problems species identification and density measurements in cases increasing gas temperatures. Our results show that, while integrated absorption cross-sections do not change significantly temperature increases, absorbing can be estimated rotational band maximum most cases. Integrated c-C3F6, C4F8, C3F8, C2F6, C2F4, CF4 are presented all fundamental bands 650 cm−1 to 2000 cm−1 region. In addition, binary combination up 4000 cm−1 species. The each varied correspond neutral temperatures commonly found
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