Direct acting vertical thermal actuator with controlled bending

摘要: A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement a micrometer-sized optical device off the surface substrate. The is constructed on At least one hot arm has first end anchored to free located above surface. cold end. relative adapted provide near thereof. member mechanically electrically couples ends arms such that bends generally at flexure so moves away from substrate when current applied arm.