Raman scattering from epitaxial TaNx (0.94 ≤x≤ 1.37) layers grown on MgO(001)
作者： M. Stoehr , C.-S. Shin , I. Petrov , J. E. Greene
DOI: 10.1063/1.2748354
关键词:
摘要: Single-crystal group-V δ-TaNx transition-metal (TM) nitride layers, with x ranging from 0.94 to 1.37, are grown on MgO(001) and analyzed by Raman spectroscopy. In perfect NaCl-structure crystals, the first-order modes not allowed Oh crystal symmetry. Since acoustic optical bands observed for all samples, this indicates presence of point defects, even stoichiometric TaN. The large mass difference between Ta N leads a correspondingly separation centered at 150 550 cm−1, respectively. A peak 440 cm−1, overlapping band, is identified as modes. Contrary case most TM nitrides, there no visible in second-order high-frequency range (700–1500 cm−1). addition, transverse (120 cm−1) longitudinal peaks (175 cm−1) do exhibit frequency shift N...
scitation.org
harvard.edu
aip.org 
sci-hub.se 参考文章(30)
J.A. Thornton, W.D. Sproul, J.E. Greene, Physics and chemistry of protective coatings American Institute of Physics,New York, NY. ,(1986)
Louis E. Toth, Transition Metal Carbides and Nitrides ,(1971)
J. -E. Sundgren, B. O. Johansson, A. Rockett, S. A. Barnett, J. E. Greene, TiNx (0.6<x<1.2): Atomic arrangements, Electronic structure and recent results on crystal growth and physical properties of epitaxial layers AIP Conference Proceedings. ,vol. 149, pp. 95- 115 ,(1986) , 10.1063/1.36035
M. Stoehr, H.-S. Seo, I. Petrov, J. E. Greene, Raman scattering from epitaxial HfN layers grown on MgO(001) Journal of Applied Physics. ,vol. 99, pp. 043507- ,(2006) , 10.1063/1.2173037
A Nigro, G Nobile, V Palmieri, G Rubino, R Vaglio, Superconducting and normal state properties of niobium-nitride thin films Physica Scripta. ,vol. 38, pp. 483- 485 ,(1988) , 10.1088/0031-8949/38/3/027
A.N. Christensen, O.W. Dietrich, W. Kress, W.D. Teuchert, R. Currat, Phonon anomalies in transition metal nitrides: δ-NbN Solid State Communications. ,vol. 31, pp. 795- 799 ,(1979) , 10.1016/0038-1098(79)90390-9
Lawrence R. Doolittle, Algorithms for the rapid simulation of Rutherford backscattering spectra Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 9, pp. 344- 351 ,(1985) , 10.1016/0168-583X(85)90762-1
B. W. Roberts, Survey of superconductive materials and critical evaluation of selected properties Journal of Physical and Chemical Reference Data. ,vol. 5, pp. 581- 822 ,(1976) , 10.1063/1.555540
C.P. Constable, J. Yarwood, W.-D. Münz, Raman microscopic studies of PVD hard coatings Surface & Coatings Technology. ,vol. 116, pp. 155- 159 ,(1999) , 10.1016/S0257-8972(99)00072-9
M. V. Klein, John A. Holy, W. S. Williams, Raman scattering induced by carbon vacancies inTiCx Physical Review B. ,vol. 17, pp. 1546- 1556 ,(1978) , 10.1103/PHYSREVB.17.1546