Electroosmotic impulsion device for integration in PCB-MEMS
作者： Antonio Luque , Jose M. Soto , Francisco Perdigones , Carmen Aracil , Jose M. Quero
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摘要: This paper presents the design and fabrication process of a microfluidic pump based on electroosmotic effect, demonstrates its working. The device is fabricated using combination standard PCB processing SU-8 photolithography, Flame Retardant 4 (FR4) as substrate, structural material to construct microchannels chambers, copper built lines for electrical connections. materials provide an inexpensive device. proposed intended be included in portable platforms impulsion which provides continuous flow rate. Preliminary experimental results show effect at 60 V, providing rate 1 μL/min.
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