Atomic force microscope having cantilever with piezoresistive deflection sensor

摘要: A microminiature cantilever structure is provided having a arm with piezoresistive resistor embedded in at least the fixed end of arm. Deflection free produces stress base cantilever. That changes resistor's resistance proportion to arm's deflection. Resistance measuring apparatus coupled measure its and generate signal corresponding The formed on semiconductor substrate. portion doped form an electrically separate U-shaped resistor. has two legs oriented parallel axis substrate non-zero coefficient. metal layer deposited over semiconductor's surface patterned electrical connection between circuit, enabling measurement resistance. Finally, below substantially removed so as cantilevered structure, tip connected facilitate structure's use atomic force microscope.