Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy
作者： Takehiro Kume , Hirokazu Hashizume , Kentarou Hiraguri , Yoichi Imamura , Hiroaki Miyashita
DOI: 10.1117/12.2528296
关键词:
摘要: Ellipsoidal mirrors are ideal focusing optics for soft x-rays because of advantages that include high numerical aperture, efficiency, and no chromatic aberrations. Shape accuracy nanometer order is required on the internal surface a mirror with diameter around 10 mm. Because difficulty processing surface, ellipsoidal fabricated by replication shapes master mandrels. In previous studies, fabrication process was developed x-ray involving mandrel nickel electroforming. 40-mm-long were focused beam full width at half maximum (FWHM) 240 nm obtained. For better performance expansion applicable energy range, we designed 120-mm-long from shape 3.8 (root mean square). A experiment also performed synchrotron radiation facility, SPring-8 (BL25SU). FWHM 1 μm
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