Method for rinsing cleaned objects
作者： Shingo Hosohata , Koichi Tamoto , Hidehiko Kawaguchi , Yuji Shimizu
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摘要: A method is disclosed for rinsing a cleaned object whereby cleaning chemical liquid adhered to the substantially removed therefrom while reducing amount of pure water used rinsing. The with thereto immersed in rinse bath filled water, so that may be rinsed off continuously fed bath. neutralizing alkalinity or acidity opposite added by feeding using feed pump and controller. Thus, neutralized liquid, thereby converted into salt readily soluble which then discharged together overflowing
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