Thermally conductive chuck with thermally separated sealing structures
作者： Mehrdad M. Moslehi
DOI:
关键词:
摘要: A chuck having two distinct portions mounts a substrate within vacuum processing chamber. first sealing stage confines gas heat-transfer interface between one portion of the and substrate. second collects escaping from an intermediate space bounded by Pressure in is reduced with respect to pressure at inhibit leakage into
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