Free-standing Silicon Membrane Microstructures for Transferable Masks
作者： Yunxiao Li , Yujie Chen , Yanfeng Zhang , Zengkai Shao , Lin Liu
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摘要: We produce silicon membrane (220 nm in thickness) with microstructures as hard masks and have transferred them on to a diamond plate, which is useful for further applications pattern etching or hybrid photonic integration.
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