An acetic acid/water based sol-gel PZT process I: Modification of Zr and Ti alkoxides with acetic acid

作者: Guanghua Yi , Michael Sayer

DOI: 10.1007/BF00402590

关键词:

摘要: The chemical reactions underlying the formation of a water based alkoxide sol gel solution for lead zirconate titanate thin films have been evaluated using infra-red spectroscopy and viscosity measurements. Titanium isopropoxide zirconium propoxide are modified by acetic acid in order to use as solvent. Substitution initially take place with titanium or acetate alcohol. gradually associate through M-O-M linkages increase solution.

参考文章(15)
Koji Nakanishi, Infrared Absorption Spectroscopy ,(1977)
M. Sayer, Piezoelectric thin film devices IEEE 1991 Ultrasonics Symposium. pp. 595- 603 ,(1991) , 10.1109/ULTSYM.1991.234232
D.W. Bondurant, F.P. Gnadinger, Ferroelectrics for nonvolatile RAMs IEEE Spectrum. ,vol. 26, pp. 30- 33 ,(1989) , 10.1109/6.29346
Guanghua Yi, Zheng Wu, Michael Sayer, Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties Journal of Applied Physics. ,vol. 64, pp. 2717- 2724 ,(1988) , 10.1063/1.341613
Michael Sayer, Ferroelectric memory programs in Canada Integrated Ferroelectrics. ,vol. 1, pp. 151- 159 ,(1992) , 10.1080/10584589208215708
K. Sreenivas, M. Sayer, D. J. Baar, M. Nishioka, Surface acoustic wave propagation on lead zirconate titanate thin films Applied Physics Letters. ,vol. 52, pp. 709- 711 ,(1988) , 10.1063/1.99354
M. Sayer, Z. Wu, C. V. R. Vasant Kumar, D. T. Amm, E. M. Griswold, Ferroelectrics for semiconductor devices Canadian Journal of Physics. ,vol. 70, pp. 1159- 1170 ,(1992) , 10.1139/P92-188
G. H. HAERTLING, C. E. LAND, Hot‐Pressed (Pb,La)(Zr,Ti)O3 Ferroelectric Ceramics for Electrooptic Applications Journal of the American Ceramic Society. ,vol. 54, pp. 1- 11 ,(1971) , 10.1111/J.1151-2916.1970.TB12105.X-I1
Guanghua Yi, Michael Sayer, An acetic acid/water based sol-gel PZT process II: Formation of a water based solution Journal of Sol-Gel Science and Technology. ,vol. 6, pp. 75- 82 ,(1996) , 10.1007/BF00402591
S. R. Gurkovich, J. B. Blum, Crystallization of amorphous lead-titanate prepared by a sol-gel process Ferroelectrics. ,vol. 62, pp. 189- 194 ,(1985) , 10.1080/00150198508225992