Calibration of Vacuum Gauges for Different Gases

摘要: This chapter presents a brief discussion of vacuum gauge calibration techniques for gases other than nitrogen or argon. In many fields application, it often becomes necessary to measure low pressures in systems containing different from those used the head (usually argon). is situation when rarefied environment composed, instance, hydrocarbon halogen gases, isotopes hydrogen, water vapor. Vacuum gauges required pressure such environments are calibrated either by determining their sensitivity unknown gas vapor (ionization heads) comparing response standard, both cases under same experimental conditions. The method Fursov (1970) calibrating thermal-type heads consists subjecting instrument exerted and measuring this balancing against known pressure. discusses with hydrogen like deuterium tritium reactive chlorine, tetraethyl lead, phenyl acetylene, iron carbonyl, uranium hexafluoride.