作者: Jingrui Niu , Wei Li , Ping Liu , Ke Zhang , Fengcang Ma
DOI: 10.3390/E21010075
关键词:
摘要: A series of (AlCrTiZrV)-Six-N films with different silicon contents were deposited on monocrystalline substrates by direct-current (DC) magnetron sputtering. The characterized the X-ray diffractometry (XRD), scanning electron microscopy (SEM), high-resolution transmission (HRTEM), and nano-indentation techniques. effects content microstructures mechanical properties investigated. experimental results show that (AlCrTiZrV)N grow in columnar grains present a (200) preferential growth orientation. addition element leads to disappearance peak, grain refinement films. Meanwhile, reticular amorphous phase is formed, thus developing nanocomposite structure nanocrystalline structures encapsulated phase. With increase content, first then decrease. maximal hardness modulus film reach 34.3 GPa 301.5 GPa, respectively, (x) 8% (volume percent). strengthening effect can be mainly attributed formation structure.