作者: E Lewis
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摘要: A temperature stable piezoresistor bridge is diffused into the surface of a pressure sensing semiconductor diaphragm formed integrally with body, and body together defining cavity within miniature unitary pressureresponsive transducer. Diffused isolation fields resistors generated at surfaces form on first wafer having given crystallographic orientation, which structure then provided electrically isolated conductors. The bonded to second similar material orientation for fully element.