Physical properties of sputtered molybdenum oxide thin films suitable for gas sensing applications
作者： D Manno , M Di Giulio , A Serra , T Siciliano , G Micocci
DOI: 10.1088/0022-3727/35/3/310
关键词:
摘要: Molybdenum oxide thin films were obtained by r.f. reactive sputtering of a molybdenum target. Optical and electrical characterization was performed in order to determine the energy gap investigate transport mechanism. In particular, showed that properties our governed scattering mechanism associated with inter-grain barrier height. Finally, analysis behaviour these controlled atmosphere allowed us test gas sensing properties, show conduction increased presence electroactive gases.
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