Liquid-gas interface plasma device
作者： Il-Gyo Koo , George J. Collins
DOI:
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摘要: A plasma system for treating a workpiece is disclosed. The includes: device including an electrode formed from metal alloy and dielectric layer covering the electrode, distal portion extending distally past end of by predetermined distance; liquid source configured to supply workpiece; ionizable media coupled thereto; power ignite at form effluent in presence liquid, whereby reacts with least one reactive species that interacts workpiece.
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